05/11/2021
Semiconductor and thin-film solar processes use and create process gases and particulate material by-products. To protect the environment from harmful emissions, these must be disposed in a controlled manner, known as ‘abatement’.
Today, many abatement systems are run 'open-loop', resulting in high levels of natural gas and nitrogen consumption. Typically, no record is kept to validate proof of abatement.
Our Aston Plasma mass spectrometer system enables in-situ, optimized control of abatement, while also creating a data log for compliance.
Learn more in our latest application brief.
To protect the environment from harmful emissions, semiconductor processes include abatement systems – but the legacy solutions present many challenges.